Electromechanical theory of microelectromechanical devices

Abstract

This paper presents a review of the electromechanical theory for microelectromechanical devices emphasizing the mutual transaction between the mechanical and electrical systems. In order to model the devices, an energy function (Lagrangian) is introduced following the derivation of the motion equations. The procedures for drawing equivalent circuits for the devices are then explained, and the characteristics are discussed in terms of a vibration energy harvesting device. Although this paper mainly deals with electrostatic electromechanical devices and a piezoelectric device, modeling of an electromagnetic device is also touched on briefly.