Elasticity modulus evaluation for a porous material by acoustic methods

Abstract

The main scope of this study is the elastic properties characterization for porous silicon due to its importance in the electronics manufacturing by micro acoustic methods. This is why high frequency ultrasound and acoustic microscopy (acoustic signature V(z)) can be used. The interpretation of experimental results for the studied material can be led with modelling the acoustic signature V(z) that is merely based on certain aspects of the wave propagation theory in porous media. We can highlight the relation between porosity and elastic properties and the velocities of surface and longitudinal waves. © Published under licence by IOP Publishing Ltd.