Recent Topics on High Density Plasma Production by Helicon Waves

Abstract

The helicon discharge has attracted growing interest as a dense plasma source (order of 1013 cm-3) for ba- sic research and various practical applications. However, the problem of a high efficiency production mecha- nism for the helicon discharge remains to be solved. This mechanism is discussed in terms of a comparison between experimental and computed results, focusing on a mode conversion theory from helicons into slow waves (Trivelpiece-Gould mode). In addition, recent topics regarding helicon wave physics as well as plasma applications and future trends in utilizing this wave are highlighted.