Surface Microstructure of Mo(C)N Coatings Investigated by AFM

Abstract

MoCN coatings have been formed by cathodic arc evaporation using the mixture of acetylene and nitrogen and pure molybdenum target. The surface structure, in conjunction with x-ray data, was analyzed by atomic force microscopy (AFM). The AFM results show differently shaped grain forms on the surface of coatings investigated. The increase in carbon in chemical coatings composition results in the reduction in surface grain size and the increase in roughness of the coatings.