Free fall mechanism of micro liquid droplet

Abstract

It is important to analyze a behavior of micro liquid droplet in order to achieve a high accuracy of LSI fabrication process such as the cleaning process, the lithography process and the etching process, patterning process and so on. By using a high-speed camera, free fall behavior of a droplet is observed. The Laplace force before falling acts to a droplet effectively. By observing the position of droplet head and tail, it is oberved that the micro droplet falls faster than the free fall velocity. By employing a droplet spring vibration system, the fall nature can be clarified. © 2010 CPST.