Application specific process development for MEMS design and fabrication

Abstract

With MEMS (Micro electro-mechanical systems) entering fast moving consumer markets, the need for a more efficient design approach becomes apparent. One of the biggest challenges in this context is that virtually every MEMS-product requires its own specifically designed and optimized manufacturing technology. The only currently feasible solution to the problems arising from this so-called MEMS-law seems to be the extensive modularization and reuse of existing manufacturing technologies. PDES (Process Development Execution Systems) provide a framework to handle MEMS manufacturing technologies. In this article a new visual approach to process modeling built on top of PDES along with a simulation interface that allows setting up and performing virtual experiments and optimization is presented. The new approach supports the device engineer in selecting an appropriate manufacturing technology based on a set of device-cross-sections. For this purpose dedicated software tools have been developed that are able to analyze the cross-sections and map the analysis results to specific technologies. The results are used to synthesize abstract process-templates that form the basis for the development of new application specific fabrication processes. The new approach is particularly suited for fabless MEMS companies that are in need to develop application specific manufacturing processes.