Impact of Transduction Scaling Laws on Nanoelectromechanical Systems

Abstract

We study the electromechanical transduction in nanoelectromechanical actuators and show that the differences in scaling laws for electrical and mechanical effects lead to an overall nontrivial miniaturization behavior. In particular, the previously neglected fringing fields considerably increase electrical forces and improve the stability of nanoscale actuators. This shows that electrostatics does not pose any limitations to the miniaturization of electromechanical systems; in fact, in several respects, nanosystems outperform their microscale counterparts. As a specific example, we consider in-plane actuation of ultrathin slabs and show that devices consisting of a few layers of graphene are feasible, implying that electromechanical resonators operating beyond 40 GHz are possible with currently available technology.