Tantalum Oxide and Silica Mixture Coatings Deposited Using Microwave Plasma Assisted Co-sputtering for Optical Mirror Coatings in Gravitational Wave Detectors

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Abstract

This work presents the characterisation of optical and mechanical properties of thin films based on (Ta2O5)1-x(SiO2)x mixed oxides deposited by microwave plasma assisted co-sputtering to demonstrate their potential as optical coatings in gravitational wave detectors.

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APA

Song, S., Cai, S., Han, D., Nuñez, C. G., Zhan, G., Wallace, G., … Gibson, D. (2022). Tantalum Oxide and Silica Mixture Coatings Deposited Using Microwave Plasma Assisted Co-sputtering for Optical Mirror Coatings in Gravitational Wave Detectors. In Optics InfoBase Conference Papers. Optica Publishing Group (formerly OSA). https://doi.org/10.1364/ao.477211

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