Applicability of time-averaged holography for micro-electro-mechanical system performing non-linear oscillations

Abstract

Optical investigation of movable microsystem components using time-averaged holography is investigated in this paper. It is shown that even a harmonic excitation of a non-linear microsystem may result in an unpredictable chaotic motion. Analytical results between parameters of the chaotic oscillations and the formation of time-averaged fringes provide a deeper insight into computational and experimental interpretation of time-averaged MEMS holograms. © 2014 by the authors; licensee MDPI, Basel, Switzerland.