High-yield fabrication methods for MEMS tilt mirror array for optical switches

Abstract

We have developed high-yield fabrication methods for a microelectromechanical systems (MEMS) tilt mirror array having high-aspect-ratio torsion springs and terraced electrodes that enable reliable tilt motion. Experimental results show that the tilt mirror motion is reliable, which makes the mirror array promising for application to 3D MEMS optical switches.