Nanostructures of Thin Films Near the Surface Examined by GISAXS Utilizing Tender X-rays

Abstract

Recent results on grazing-incidence small-angle scattering have been introduced with emphasis on the use of tender X-rays. Merit of using longer wavelength to understand depth dependence of nanostructures in thin films are presented, along with some drawbacks in using long wavelength. Applications on semiconductor nanodots and micro-phase separated block copolymer thin films are shown. Use of resonant scattering in the tender X-ray region gives opportunity for contrast matching GISAXS experiments, which may reduce complicated situation of dynamical effect upon analysis.