Inorganic materials and coatings produced by EBPVD

Abstract

The present paper describes the process of high speed electron beam evaporation of inorganic substances under vacuum and process parameters controlling the deposition, structure and properties of thick condensates (films). Considered are examples of single phase and multiphase metal, metal-ceramic, cermet and ceramic condensates of the thickness from several micrometres to several millimetres with dispersed, multilayer, porous and graded structures in a broad range of structural element dimensions. Dimensional effects in the structure and mechanical properties of thick condensates are noted. Areas of practical application of inorganic materials deposited from the vapour phase are described. © 2006 Institute of Materials, Minerals and Mining.