Micro-hexapod robot with an origami-like SU-8-coated rigid frame

Abstract

In recent years, many microrobots have been developed for search applications using swarms in places where humans cannot enter, such as disaster sites. Hexapod robots are suitable for moving over uneven terrain. In order to use micro-hexapod robots for swarm exploration, it is necessary to reduce the robot's size while maintaining its rigidity. Herein, we propose a micro-hexapod with an SU-8 rigid frame that can be assembled from a single sheet. By applying the SU-8 coating as a structure to the hexapod and increasing the rigidity, the substrate size can be reduced to within 40 mm × 40 mm and the total length when assembled to approximately 30 mm. This enables the integration of the micro electromechanical systems (MEMS) process into small and inexpensive hexapod robots. In this study, we assembled the hexapod with a rigid frame from a sheet created using the MEMS process and evaluated the leg motion.