Effects of dielectric film surface on oxygen diffusion

Abstract

The oxygen diffusivity in BaTiO3 thin films heteroepitaxially grown on SrTiO3 substrates was investigated using a gas/solid exchange technique with 18O-isotope-enriched gas. Deformation of the BaTiO 3 lattice and inhibition of the oxygen diffusivity occurred simultaneously when the YSZ layer, which is assumed to be catalytic for the 18O/16O exchange reaction, was deposited on BaTiO3. The mechanism for the reduction in oxygen diffusivity due to the YSZ cover layer is discussed in terms of residual stress in the strained BaTiO3 layer. © 2014 The Ceramic Society of Japan.