Mask-based dual-axes tomoholography using soft x-rays

Abstract

We explore tomographic mask-based Fourier transform x-ray holography with respect to the use of a thin slit as a reference wave source. This imaging technique exclusively uses the interference between the waves scattered by the object and the slit simplifying the experimental realization and ensuring high data quality. Furthermore, we introduce a second reference slit to rotate the sample around a second axis and to record a dual-axes tomogram. Compared to a single-axis tomogram, the reconstruction artifacts are decreased in accordance with the reduced missing data wedge. Two demonstration experiments are performed where test structures are imaged with a lateral resolution below 100 nm.