MEMS Resonant Cantilevers for High-Performance Thermogravimetric Analysis of Chemical Decomposition

Abstract

We investigate the MEMS resonant cantilevers for high-performance thermogravimetric analysis (TGA) of chemical decomposition, featuring high accuracy and minimized thermal lag. Each resonant cantilever is integrated with a microheater for sample heating near the free end, which is thermally isolated from the resonance excitation and readout elements at the fixed end. Combining finite element modeling and experiments, we demonstrate that the sample loading region can stabilize within ~11.2 milliseconds in response to a step heating of 500 °C, suggesting a very fast thermal response of the MEMS resonant cantilevers of more than 104 °C/s. Benefiting from such a fast thermal response, we perform high-performance TG measurements on basic copper carbonate (Cu2(OH)2CO3) and calcium oxalate monohydrate (CaC2O4·H2O). The measured weight losses better agree with the theoretical values with 5–10 times smaller thermal lags at the same heating rate, compared with those measured by using conventional TGA. The MEMS resonant cantilevers hold promise for highly accurate and efficient TG characterization of materials in various fields.