Study of incubation effects during surface ablation using picosecond pulses at a wavelength of 800 nm

Abstract

A comparison of laser ablation on the front-surface (surface facing the laser) and back-surface of 1.1 mm thick boro-aluminosilicate glass plates has been performed using 1 ps pulses at a wavelength of 800 nm. The resulting structures of front- and back-surface ablation are compared relative to an input design geometry of 40 μm deep and 40 μm wide surface channels. The influence of incubation effects on the final structure is discussed. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.