AlScN-Based SAW Magnetic Field Sensor for Isolated Closed-Loop Hysteretic Current Control of Switched-Mode Power Converters

Abstract

This letter uses a surface acoustic wave magnetic field sensor for measurement and closed-loop current control of the inductor current in a GaN-based dc-dc power converter. The sensor is based on aluminium scandium nitride thin films with relatively high Sc concentration of 32% and fabricated on low-cost 8-in silicon substrate, with a magnetostrictive FeCoSiB film on top of a SAW delay line. The device has dc and bidirectional current measurement capability (derived from the magnetic flux density around a current trace) and is operated electrically isolated above the current trace. With permanent magnets as magnetic bias, the setup has a usable bidirectional current range of ±5 A. A phase detector IC measures the phase shift between the 296 MHz, 19 dBm input, and 35 dB attenuated output signal of the delay line sensor. The active sensor area has a distance of 2.5 mm from the current trace. In a 1.2 mT bias, the sensor is operated with a sensitivity of 18.28°/mT and bipolar current range of up to ±5 A. The sensor signal is enhanced by an analog filter to compensate the over 1 μs delay from the delay line and readout circuit. Finally, the sensor is used as the input of an analog hysteretic current control loop. The closed-loop current control operation is demonstrated using a 48 V GaN-based half-bridge dc-dc converter with 16 kHz triangular inductor current.