Evaluation of line and hole measurement by high-resolution low-magnification CD SEM

Ke, C.-M., Lee, C.-C., Wang, Y.-H., Lee, H.-J., Lin, C.-H., Gau, T.-S., … Iizumi, T. (2005). Evaluation of line and hole measurement by high-resolution low-magnification CD SEM. In Metrology, Inspection, and Process Control for Microlithography XIX (Vol. 5752, p. 1292). SPIE. https://doi.org/10.1117/12.601133