Self-powered ion gauge and self-powered ion pump

Abstract

We used a radioisotope63Ni thin-film source as a cold cathode to realize a Self-Powered Ion Gauge (SPIG), demonstrating the largest sensitivity range among all reported pressure sensors, from high vacuum (10-6 Torr) to high pressure (103 Torr). We also show that SPIG can be transformed into a Self-Powered Ion Pump (SPIP) due to self-charge generated voltage induced ion-implantation of ionized gas atoms. The combination of SPIG and SPIP provides a near-zero-power solution to measuring and maintaining high vacuum in micro-system packages. The amount of radioactivity is in the micro-Ci to milli-Ci range, which is a commercially viable from both the point of view of safety and cost in a sealed package.