Preparation and Magnetic Properties of Sputter-Deposited Fe-Pt Thin Films with Perpendicular Anisotropy

Abstract

Preparation and Magnetic Properties of Sputter-Deposited Fe-Pt Thin Films with Perpendicular Anisotropy Toshio SUZUKI, Naoki HONDA and Kazuhiro ouem AIT (Akita Research Institute of Advanced Technology) 4-21 Sanuki, Araya, Akita 010-16, Japan Abstract --- Preparation of Fe-Pt perpendicular magnetic thin films on glass substrates were examined, aiming at thennally stable media in future high density recording. It was found that high pressure sputterdeposition and an underlayer ofCr(200) were essential to obtain an ordered fet structure and control the c-axis of the crystal structure to the film normal, respectively. The FePt film with perpendicular magnetic anisotropy having a coercivity of 7.3 kOe and a saturation magnetization of over 600 emu/em3 was successfully obtained. In the case of direct deposition onto a glass substrate, the film had a high squareness and a large coercivity in both the perpendicular and longitudinal directions, while the crystal orientation was almost random. Key words: FePt, ordered fet structure, perpendicular magnetic anisotropy, high pressure sputter-deposition, Cr(200) underlayer, thermally stable media