Dielectric-to-dielectric charging characteristic in mems switches with continuous and discontinuous contact

Abstract

A dielectric charging characterization is presented based on simple MEMS structures with continuous and discontinuous insulator-insulator contact. The amount of surface charging generated by triboelectric effects when both insulators are in contactis strongly dependent of the area of contact and electric field. Electrostatic simulation and hold-down measurements were done to characterize the surface charging on continuous and discontinuous teststructures that minimizes the contact area and electric field. The results have shown a considerable decrease of surface charge generation on discontinuous contact.