Temperature dependant thermal and mechanical properties of a metal-phase change layer interface using the time resolved pump probe technique

Abstract

Time Resolved Pump Probe (TRPP) technique has been implemented to study the thermal and mechanical properties of Ge2Sb2Te5 (GST) film deposited on a silicon substrate. According to the knowledge of the thermal properties of the GST layer, the temperature dependant Thermal Boundary Resistance (TBR) at the metal-GST interface is evaluated. Measuring the acoustic oscillation and more particularly its damping leads to characterize the adhesion at the metal - GST interface. This quantity can be efficiently related to the temperature dependent TBR in the 25°C - 400°C range. The TBR increases with temperature and follows the changes of the crystalline structure of materials. A linear relation between the acoustic reflection coefficient and the logarithm of the thermal boundary resistance is found.