Low-pressure NEMS sensor design with slotted squared diaphragm structure

Abstract

This research mainly focused on the design, analyze and simulate the diaphragm based MEMS pressure sensor using squared and slotted squared structure to measure the performance parameters. Four piezoresistor are placed in the weight stone bridge configuration. When pressure is applied to the diaphragm, stress is induced due to the resistance change of the piezoresistors. This piezoresistive pressure sensor with two different structures is designed to evaluate the stress and deformation. It is found that slotted squared structure obtain improved stress and deformation as compared to the squared structure by 2.2% and 1.8% vice versa. Silicon piezo-resistor is replaced with piezoresistors of CNT material and deformation is improved by 1.7%.