Coupling of a locally implanted rare-earth ion ensemble to a superconducting micro-resonator

Abstract

We demonstrate the coupling of rare-earth ions locally implanted in a substrate (Gd3+ in Al2O3) to a superconducting NbN lumped-element micro-resonator. The hybrid device is fabricated by a controlled ion implantation of rare-earth ions in well-defined micron-sized areas, aligned to lithographically defined micro-resonators. The technique does not degrade the internal quality factor of the resonators which remain above 105. Usi ng microwave absorption spectroscopy, we observe electron-spin resonances in good agreement with numerical modelling and extract corresponding coupling rates of the order of 1 MHz and spin linewidths of 50-65 MHz.