Abstract
We fabricate suspended single-mode optical waveguides and ring resonators in 3C-SiC that operate at telecommunication wavelength, leverage post-fabrication thermal annealing to minimize optical propagation losses and demonstrate Q of over 41,000.
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CITATION STYLE
APA
Powell, K., Shams-Ansari, A., Desai, S., Austin, M., Deng, J., Sinclair, N., … Yi, X. (2020). High-Q suspended optical resonators in 3C-SiC obtained by thermal annealing. In Optics InfoBase Conference Papers (Vol. Part F183-CLEO-SI 2020). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/CLEO_SI.2020.STu3P.3
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