Micro-fabricated liquid encapsulated energy harvester with polymer barrier layer as liquid electret interface

Abstract

This paper addresses the electret discharge issue for liquid based electret energy harvesters. An interface structure of PDMS/PTFE polymer barrier layer between liquid and electrets is introduced, achieving 75% charge retain rate over 100h, compared with 0% without the proposed layer over 100h. Further, the PDMS/PTFE layer is introduced into liquid encapsulated energy harvester (LEEH) and is compatible with micro-fabrication process. The retain rate of device voltage is about 47%∼65% over 100h. At 100h after corona charging, the device generates maximally 3.7V, 0.55μW @1Hz rotation.