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Gritz, M. A., Metzler, M., Moser, J., Spencer, D., & Boreman, G. D. (2003). Fabrication of air bridges using electron beam lithography. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 21(1), 332–334. https://doi.org/10.1116/1.1539062
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