Development of heavy ion beam sputtering method for long-lived carbon stripper foils

Abstract

A heavy noble gas ion beam sputtering (HIBS) technique was developed to prepare carbon stripper foils with a characteristic of long lifetime. The dependence of lifetimes on the mass of noble gas was also investigated. Compared with foils made by lighter ions such as Ne and Ar, the foils made by Kr and Xe noble gases were not so much stronger mechanically, but were long-lived under bombardment with a 3.2 MeV Ne+ ion beam 3 μA in intensity and 3.5 mm in diameter. The mean lifetime in the case of Kr sputtering gas was around 51 mC, 20 times longer than that of commercially available foils. The key point in producing long-lived foils with Kr or Xe noble gas ions was found to be to decrease the amount of oxygen contaminants as much as possible. © 1992.