On Legalization of Die Bonding Bumps and Pads for 3D ICs

Abstract

State-of-The-Art 3D IC Place-And-Route flows were designed with older technology nodes and aggressive bonding pitch assumptions. As a result, these flows fail to honor the width and spacing rules for the 3D vias with realistic pitch values. We propose a critical new 3D via legalization stage during routing to reduce such violations. A force-based solver and bipartite-matching algorithm with Bayesian optimization are presented as viable legalizers and are compatible with various process nodes, bonding technologies, and partitioning types. With the modified 3D routing, we reduce the 3D via violations by more than 10× with zero impact on performance, power, or area.