Status Monitoring of Ultraprecision Machining Using Micro Thermo Sensor and AE Sensor

Abstract

Higher machining accuracy and productivity have been recently required in various manufacturing industry. Machining monitoring requirements have grown increasingly severe. To meet these strict requirements, we developed machining status monitoring system for ultraprecision process combining an original micro thermo sensor and an acoustic emission (AE) sensor. Ultraprecision machining experiments confirmed that the developed monitoring system detects machining status using feature parameters defined relating output signals to machining conditions.