Structural features of formed coatings and films of refractory compounds

Abstract

A comparative analysis of the microstructure and properties of coatings based on refractory compounds is performed depending on the deposition conditions (temperature and substrate potential, partial pressure of working gas). A general regularities consisting in the presence of the columnar structure and the growth texture are revealed for hard and superhard nanostructured (nanocomposite) coatings. As shown, there are two possible directions of growth 111 and 100 for transition metals' carbide and nitride coatings; for transition metals' diboride coatings such a direction is 0001. The effect of the structural state on the changes in the physical and mechanical properties of nanocrystalline coatings based on nitrides, carbides and borides of transition metals is analysed.