Conference Proceedings

Important of MoS 2 -Compound Sputtering even with Sulfur-Vapor Anneal for Chip-Size Fabrication

  • Imai S
  • Hamada T
  • Hamada M
  • et al.
DOI: 10.7567/ssdm.2020.h-2-03
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Imai, S., Hamada, T., Hamada, M., Shirokura, T., Muneta, I., Kakushima, K., … Wakabayashi, H. (2022). Important of MoS 2 -Compound Sputtering even with Sulfur-Vapor Anneal for Chip-Size Fabrication. Japan Society of Applied Physics. https://doi.org/10.7567/ssdm.2020.h-2-03

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