Young's modulus and energy dissipation determination methods by AFM, with particular reference to a chalcogenide thin film

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Abstract

There are two main ways to investigate mechanical properties by atomic force microscopy (AFM): force curve measuring and tapping-mode phase mapping. This paper provides an overview of these techniques with special regards to the determination of Young's modulus from force curves and the calculation of tip-sample energy dissipation from phase maps. Besides, both methods were used to study the mechanical properties of amorphous chalcogenide thin film samples. As20Se80 thin film was prepared by thermal evaporation on a glass substrate and a He-Ne laser (633 nm) was used to prepare a holographic grating on the thin film. The obtained results showed significant difference in the Young's modulus between the peaks and the valleys and contrast was also observed on the dissipation map which can be connected to the variation of mechanical properties in accordance with the grating.

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Kámán, J. (2015). Young’s modulus and energy dissipation determination methods by AFM, with particular reference to a chalcogenide thin film. Periodica Polytechnica Electrical Engineering and Computer Science, 59(1), 18–25. https://doi.org/10.3311/PPee.7865

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