Design and Construction of a Small Vacuum Furnace

Abstract

The purpose of this research is designed and constructed of a small vacuum furnace. A cylindrical graphite was chosen as the material of the furnace, the cylinder aluminium and copper sheets were employed to prevent the heat radiation that transfers from the furnace to the chamber wall. A rotary pump used, the pressure of graphite furnace can be pumped up to 30 mTorr and heated up to 700 °C driving by wire and the temperature of the chamber wall is relatively remained too low. In addition, heat loss obtained from the graphite furnace by conduction, convection, and radiation were analyzed. The dominating heat loss was found to be caused by the blackbody radiation, which can thus be used to estimate the relationship between graphite furnace temperature and the drive power needed. The cylindrical graphite furnace has an inner diameter of 44 mm, the outer diameter of 60 mm and 45 mm in height, the 355.5 W of power is needed to drive the furnace to 700 °C.