Optical 3D Surface Measuring Technology

Abstract

For surface inspections that are indispensable in many of today's industries, the trend is heading toward smaller and smaller structures that must be reproduced or resolved accurately at nanometer level. Optical measurement processes as contact‐free and destruction‐free analysis and test methods are chosen for many applications because they can be applied to almost all materials and are also suitable for sensitive samples. Highly precise, confocal reproduction principles can present the sample topography and roughness structures not only qualitatively, but also correspondingly quantitatively using matching tactile measurement methods that are described in many industry standards. Piezo‐based positioning systems are making considerable contributions in this field.