Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

Abstract

Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO 2 /Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a P r of 40.5 μC/cm 2 and an E c of 156 kV/cm. © 2011 KIEEME. All rights reserved.