Mechanical strengths of silicon nitrides studied by ab initio calculations

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Abstract

The stress-strain relationships under tensile and shear loads are calculated for hcp (Β) - Si3 N4 and fcc(NaCl)-SiN by means of ab initio density functional theory. The ideal shear strengths for fcc-SiN are much lower than those for hcp- Si3 N4. This is in agreement with experiments which show that the interfacial fcc-SiN can strengthen the TiNSiN heterostructures only when its thickness is about 1-2 ML. Based on the calculated electronic density of states, the physical origin of the mechanical strengths is addressed. © 2007 American Institute of Physics.

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Zhang, R. F., Sheng, S. H., & Veprek, S. (2007). Mechanical strengths of silicon nitrides studied by ab initio calculations. Applied Physics Letters, 90(19). https://doi.org/10.1063/1.2737376

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