Surface Modification Using Reactive Landing of Mass-Selected Ions

Abstract

Collisions of ions with surfaces play an important role in a variety of scientific disciplines, including surface science, materials science, mass spectrometry, imaging, and spectroscopy. Ion-surface collision phenomena are broadly used in many analytical methods and surface modification techniques, including secondary ion mass spectrometry (SIMS) [1–3], chemical imaging [4], ion scattering spectrometry [5], surface-induced dissociation (SID) [6–8], ion soft landing [9, 10], growth and modification of thin films [11], and formation of three-dimensional nanostructures [12]. Physical phenomena that occur during ion-surface collisions have been extensively reviewed [9–11]. These include physisorption or ion deposition, elastic and inelastic scattering, chemical reactions, charge exchange, sputtering, and ion implantation.