E-beam mask repair: fundamental capability and applications

Abstract

We have installed the industry's first commercial electron beam mask repair tool in Intel's mask shop. In this paper we describe our ongoing efforts of developing e-beam repair processes for binary, phase-shifting and EUVL masks. We present a complete characterization of fundamental capabilities of e-beam repair and make general comparisons with other technologies, in terms of repair resolutions, substrate damage, edge placement, removal selectivity, and process margin. Among many applications, results from quartz etch with excellent resolution and vertical profile are described.