Two-photon photopolymerization of functional micro-devices

Abstract

The current trend in two-photon laser micro-nano fabrication is device functionalization. In this paper, we report two kinds of functional devices, i.e., optically active microstructures produced by dye-doping photopolymerization and mechanically workable micro-oscillators driven by the laser trapping force. These works would open the door to two-photon production of various practical three-dimensional polymer optoelectronic/photonic devices and microelectromechanical system (MEMS).