Structure and properties of CIGS films based on one-stage RF-sputtering process at low substrate temperature

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Abstract

Currently, Nanjing South Railway Station planning to implement slate roof renovation is integrating solar cell modules into traditional roof materials to generate clean energy. Copper-indium-gallium diselenide (CuIn1-xGaxSe2, CIGS) is one of the most promising materials for thin film solar cells. Cu(In1-xGax)Se2 films were deposited by a one-step radio frequency magnetron sputtering process at low substrate temperature. X-ray diffraction, Raman, scanning electron microscopy, energydispersive X-ray spectroscopy, and electrical and optical measurements were carried out to investigate the deposited films. The results reveal that a temperature of 320°C is critical for near-stoichiometric CIGS films with uniform surface morphology. Cu-rich phase particulates are found at less than this temperature. The sample deposited at 380°C gives well-crystalline single-phase CIGS film. Furthermore, the electrical and optical performances of the absorber layer are improved significantly with the increasing substrate temperature. © The Author(s) 2013. This article is published with open access at Springerlink.com.

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Yan, Y., Li, S., Ou, Y., Ji, Y., Yan, C., Liu, L., … Zhao, Y. (2014). Structure and properties of CIGS films based on one-stage RF-sputtering process at low substrate temperature. Journal of Modern Transportation, 22(1), 37–44. https://doi.org/10.1007/s40534-014-0035-1

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