Removal of floating dust in glow discharge using plasma jet

Abstract

Dust can be an inconvenient source of impurities in plasma processing reactors and in many cases it can cause damage to the plasma-treated surfaces. A technique for dust expulsion out of the trapping region in plasma is presented here, based on the wind force exerted on dust particles by a pulsed plasma jet. Its applicability is demonstrated by removing floating dust in the sheath of parallel-plate capacitive radio-frequency plasma. © 2010 American Institute of Physics.