Nanocomposite rubber elastomer with piezoresistive detection for flexible tactile sense application

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Abstract

This work presents flexible tactile sensor using piezoresistive nanocomposite rubber elastomers (C-PDMS): Carbon-black (C) powders filled into polymethylsiloxane (PDMS) using solvent-wetting methods with n-Hexane to produce well-dispersed conductive polymeric nanocomposites. The C-PDMS nanocomposites are utilized to measure resistance changes. In application, the C-PDMS is casted and stacked into PDMS substrate and gold films deposited with 3-mercaptopropyltrimethoxysilane (MPTMS) adhesion layers as bond pads to implement the flexible polymer-based devices. Typical normal load tests show resistance changes of C-PDMS piezoresistors on flat surface are ranging 2.92%∼4.45% (ΔR/R0/mN). Moreover, resistance changes of C-PDMS piezoresistors on curved surface are ranging 0.92%∼0.98% (ΔR/R0/mN).

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Wang, J. J., Lu, C. E., Huang, J. L., Chen, R., & Fang, W. (2017). Nanocomposite rubber elastomer with piezoresistive detection for flexible tactile sense application. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 720–723). Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1109/MEMSYS.2017.7863509

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