Simple method preparation for ultrathin VO2 thin film and control: Nanoparticle morphology and optical transmittance

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Abstract

Nanoscale morphology of vanadium dioxide (VO2) thin films can be controlled to realize smooth ultrathin crystalline films (<10 nm) with a simple way of DC sputtering. Here, crystallization annealing conditions determine whether a continuous ultrathin film or nanoparticle morphology is obtained. The experiments show that ultrathin VO2 thin films possess both a highly crystal orientation (020) and an obvious metal-insulator transition (MIT). Meanwhile, optical transmittance between the visible and near-infrared regions can be modulated by thin film thickness, and the strain in the VO2 lattice is also found to be dependent on the thin film thickness. The 8 nm thickness thin film shows that the change of resistance and visible transmittance is 2.8 orders of magnitude and 77.5%, respectively.

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Sang, J., Wang, P., Meng, Y., Xu, X., Sun, J. L., Wang, Y., … Chen, X. (2019). Simple method preparation for ultrathin VO2 thin film and control: Nanoparticle morphology and optical transmittance. Japanese Journal of Applied Physics, 58(5). https://doi.org/10.7567/1347-4065/ab0713

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