A novel SCR-based protection structure against ESD with efficient multi-finger triggering

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Abstract

In this paper, a new SCR-based protection structure is presented relying on the bimodal operation of an LSCR. STMSCR is multi-finger compliant, thus allowing area-efficient design of pad-located ESD protection. Without any process customisation, an HBM failure threshold over 115 Vμm is reached for the first time while always ensuring current uniformity in multi-finger structures.

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Azais, F., Caillard, B., Dournelle, S., Nouet, P., & Salomé, P. (2003). A novel SCR-based protection structure against ESD with efficient multi-finger triggering. In European Solid-State Device Research Conference (pp. 207–210). IEEE Computer Society. https://doi.org/10.1109/ESSDERC.2003.1256850

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