A theoretical model and analysis of composite membrane of a piezoresistive pressure sensor

Abstract

In this paper, an analytical model of the composite membrane piezoresistive pressure sensor with the testing structure is established, which built the relationship between the electrostatic force and the material properties, dimension parameters of the sensor. By using the theoretical model of the sensor, it is easily to analyze the sensor's performance, to optimize the dimension of the sensor, and to make the step of calibrating to be getting fast and accurate.