Hard X-ray scanning microscopy with coherent diffraction contrast

Abstract

A hard x-ray scanning microscope based on nanofocusing refractive x-ray lenses is well suited for coherent x-ray diffraction imaging, in particular for scanning coherent diffraction microscopy also known as ptychography. Using this technique, the complex transmission function of the object can be obtained with a spatial resolution better than that given by the size of the nanofocus. In addition, the full complex wave field in the plane of the sample can be reconstructed simultaneously, allowing for a complete characterization of the illuminating nanobeam. This is illustrated by a ptychogram of a test structure recorded at 24.3 keV. © 2011 American Institute of Physics.