High density integrated capacitors using multi-walled carbon nanotubes

Abstract

The development of high density integrated capacitors is crucial for the implementation of high performance mixed-signal integrated circuits. In this paper, we propose three possible high density integrated capacitor configurations based on multiwalled carbon nanotubes (MWCNT). We develop an RLC model for the MWCNT-based capacitor configurations and examine the design trade-off between capacitance per area and losses due to parasitic resistance and inductance. The results indicate that the proposed MWCNT-based capacitor configurations can potentially offer orders of magnitude larger capacitance per area and comparable quality factors to traditional metal-based integrated capacitors. © 2007 IEEE.