Geometric optimization of magnetically actuated MEMS micromirrors

Abstract

In this paper we develop a set of self-consistent equations describing the static and resonance characteristics of a rectangular micromirror actuated by driving a current into a multicoil inductor fabricated on the micromirror surface. Under fairly general assumptions, these equations can be solved analytically for the most common design targets, such as the driving current, deflection angle, resonance frequency, and overall dimensions. We use this solutions to optimize the micromirror geometry by minimization of a linear objective function. The tradeoffs that emerge from optimization data allow simple quantitative design of low current, low size mirrors.